FIB-SIMS Ionenmikroskop

to be installed in 09/2024:

Ion microscopy with GaBiLi for FIB imaging and SIMS

ion microscope FIB-SIMS with multi-species ion beam technologies (Li⁺, Ga⁺ and Bi⁺ ions) for nanofabrication and additional magnetic sensor SIMS detector for extremely sensitive analysis of the surface composition