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Nanolab
Thin film deposition and etching
Equipment
Equipment
Microscopy
Lithography
Thin film deposition and etching
Thin film analysis
Sample processing
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research groups at the department of physics
research groups at the department of chemistry
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Department of Physics
Nanolab
Equipment
Thin film deposition and etching
sputtering systems
thermal evaporation
spincoating
plasma etching
wet chemical etching
Bildbeschreibung anzeigen
close-up view of the ATC Orion 5 UHV with an Ar plasma burning; Copyright: Inka Reiter
versatile deposition and etching systems
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