The SENresearch 4.0 by SENTECH Instruments GmbH is a high precision spectroscopic ellipsometer which can be used to determine optical constants and film thicknesses of single layer or (simple) multilayer systems.
Besides from variation of wavelength from 240 nm to 2.5 µm, the SENresearch features angle of incidence variation realized by an automated goniometer.
References: SENTECH Instruments GmbH, Operating Instructions , 2018.