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Nanolab

Equipment

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    • Microscopy
    • Lithography
    • Thin film deposition and etching
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Department of Physics Nanolab Equipment

Nanolab equipment

microscopes

electron and optical microscopes for examining micro- and nanoscale devices

lithography

deposition and etching

tools for depositing and etching dielectric materials, semiconductors, metallic films and photoresists

surface analysis

sample processing

tools for TEM-sample preparation, electrical contacting and testing
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